{
    "help": "",
    "success": true,
    "result": [
        {
            "id": "dc66dc03-a157-4179-8d8c-19999bcfe8ff",
            "@context": "http://schema.org",
            "@type": "Dataset",
            "@id": "https://doi.org/10.34711/inptdat.599",
            "url": "https://www.inptdat.de/node/599",
            "name": "Verified modeling of a low pressure hydrogen plasma generated by electron cyclotron resonance - dataset",
            "author": [
                {
                    "@type": "Person",
                    "name": "Sigeneger, Florian"
                },
                {
                    "@type": "Person",
                    "name": "Ellis, James"
                },
                {
                    "@type": "Person",
                    "name": "Harhausen, Jens"
                },
                {
                    "@type": "Person",
                    "name": "Lang, Norbert"
                },
                {
                    "@type": "Person",
                    "name": "van Helden, Jean-Pierre"
                }
            ],
            "publisher": {
                "@type": "Organisation",
                "name": "INPTDAT"
            },
            "datePublished": "2022-10-10",
            "description": "A self-consistent \ufb02uid model has been successfully developed and employed to model an electron cyclotron resonance driven hydrogen plasma at low pressure. This model has enabled key insights to be made on the mutual interaction of microwave propagation, power density, plasma generation, and species transport at conditions where the critical plasma density is exceeded. The model has been veri\ufb01ed by two experimental methods. Good agreement with the ion current density and \ufb02oating potential \u2013 as measured by a retarding energy \ufb01eld analyzer \u2013 and excellent agreement with the atomic hydrogen density \u2013 as measured by two-photon absorption laser induced \ufb02uorescence \u2013 enables a high level of con\ufb01dence in the validity of the simulation. The dataset contains most of the simulation and measurement data presented in the related paper publication.",
            "keywords": "ECR plasma, Model validation, fluid modelling, basic research"
        }
    ]
}