All modelling studies were performed for two test cases, namely DC and RF low-pressure glow discharges in argon using a plane-parallel electrode configuration. DC case: A contant DC voltage of 350 V is applied at the powered electrode. RF case: a sinusoidal voltage with an amplitude of 350 V and a frequency of 13.56 MHz is used. The gap distance is set to 1 cm.
\n", "procedure": "The DC and RF discharges a simulated until reaching a quasi-stationary state.
\n" }, "medium": { "name": "Ar", "properties": "Pressure: 1 Torr
\nTemperature: 300 K
Gas temperature and pressure are kept constant throughout the simulations.
\n" }, "target": [], "diagnostics": { "name": "fluid-Poisson model, MCPlas", "properties": "The plasma description provided by MCPlas is based on a fluid-Poisson model comprising balance equations for the particle number densities of species, a balance equation for the energy density of electrons and the Poisson equation for the self-consistent determination of the electric potential and electric field. The particle fluxes and the electron energy flux are described in different drift-diffusion approximations, where DDAn and DDA5/3 are used for electrons.
\n", "procedure": "The model generated by MCPlas is compared with the COMSOL Plasma Module (CPM). To demonstrate the ability of MCPlas to manage different reaction kinetic models (RKMs), a 4-species and a 23-species RKM are used to model the DC and RF argon plasmas. Furthermore, the reusability of the JSON schema-based input data defining the RKM is demonstrated by a comparison study involving the plasma modelling toolboxes PLASIMO and FEDM.
\n" } } }