The invention relates to a process of treating objects, particularly of cleaning and decontaminating or disinfecting or sterilizing objects. A plasma processed gas (PPG) is provided, and by contacting this plasma processed gas (PPG) with a liquid, a sterilizing gas and a sterilizing liquid are generated. The objects to be treated are contacted with the sterilizing liquid in a first treatment step and with a treatment gas in a second treatment step, wherein the treatment gas can be the sterilizing gas or the plasma processed gas (PPG). The invention further relates to a device for the cleaning and decontamination or disinfection or sterilization of objects.