The present invention relates to an apparatus for igniting and generating a propagating, diffuse microwave plasma. The device is suitable for generating microwave plasmas for the purpose of plasma treatment of surfaces and substances, in particular of three-dimensional objects as well as of particles under atmospheric pressure.
The solutions according to the invention are presented in the claims.
Figure 1 of the Patent Specification
In Figure 1 is the schematic structure of a basic device for implementing the process for igniting and generating an expanding, diffuse microwave plasma within a wave-limiting hollow structure.
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