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Verified modeling of a low pressure hydrogen plasma generated by electron cyclotron resonance - Fig. 12

Comparison of the calculated and measured dependence of the probe current density on power for the probe position zp = 10 cm and a pressure of 7 Pa. The table contains in the first column the absorbed power, in the second column the measured current density, in the third column the calculated total ion current density and in the following columns the calculated contribution of H3+ (forth column) and H+ (fifth columns) ions.

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