The effect of oxygen admixture on the properties of microwave generated plasma in Ar-O₂ : a modelling study - dataset

This work presents the datasets of the results of a self-consistent modelling analysis on microwave plasma generated in Ar-O₂ mixtures at a frequency of 2.45 GHz at atmospheric pressure. The study focuses on how the plasma properties are in uenced by the increase of the oxygen fraction in the gas mixture. The oxygen admixture is increased from 1 up to 95 % in mass for values of the input microwave power of 1 and 1.5 kW.