This work presents the datasets of the results of a self-consistent modelling analysis on microwave plasma generated in Ar-O₂ mixtures at a frequency of 2.45 GHz at atmospheric pressure. The study focuses on how the plasma properties are in uenced by the increase of the oxygen fraction in the gas mixture. The oxygen admixture is increased from 1 up to 95 % in mass for values of the input microwave power of 1 and 1.5 kW. The results show that for a power of 1 kW and gradually increasing the oxygen admixture from 1 to 25 % the electron density drops by a factor of more than 4 due to the energy lost by the electrons due to dissociation of oxygen molecules and the gas heating. An analysis of the number densities of species produced in the Ar-O₂ plasma is presented. Oxygen admixtures of above 50 % are considered along with an increase of the input microwave power in order to supply the discharge with electron number density values of the order of 10^19 m^-3. Gas temperatures above 3700 K are obtained in the plasma core along with a strong production of oxygen atoms with a number density of the order of 10^23 m^-3.

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Authors | |

Release Date | 2021-03-01 |

Identifier | adeb6746-9957-4b9c-afcf-f9b2e14b21bc |

Permanent Identifier (DOI) | |

Permanent Identifier (URI) | |

Is supplementing | |

Plasma Source Name | |

Plasma Source Application | |

Plasma Source Specification | |

Plasma Source Properties | For an incoming power of 1 kW, the predicted absorbed power varies from 56 W (1% O2) up to 211 W (50% O2). The electron temperature in the main plasma region increases with the increase of oxygen admixture from about 0.87 to 1.1 eV. The obtained number density of electrons at 1% O2 of about 10^20 m^-3 progressively decreases with the increase of the oxygen admixture. |

Plasma Source Procedure | The microwave plasma is generated in a quartz tube placed in a rectangular waveguide at the position of maximum electric field. A gas (Ar or mixtures Ar/O2) is fed through the tube. The plasma initially ignites at the position of maximum electric field but moves towards the incoming microwave. Due to the interaction of the plasma with the microwave a part of the incoming microwave power is absorbed while a significant part of the power is reflected back. The reflected power is larger in pure Ar. The admixture of oxygen allows one to couple a larger part to the plasma. Electron density in the order of 10^20 m^-3 and electron temperature of about 1 eV are reached. The gas temperature can reach values between about 1000 K and 4000 K. |

Plasma Medium Name | |

Plasma Medium Properties | Mixture of Ar and O2, the O2-admixture is varied from 1% up to 95% in mass. The gas flow rate is varied from 2slm up to 16 slm. Typical flow rates are between 14 and 16 slm. |

Plasma Medium Procedure | The increase of the O2-admixture has to be followed by an increase of the input power to keep the maximum value of the electron number density. The gas flow rate has to be matched to avoid overheating of the tube walls. |

Language | English |

License | |

Public Access Level | Public |

Contact Name | Baeva, Margarita |

Contact Email |

#### Data and Resources

- The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 3acsv
Computed plasma parameters at the position of the probe-point for 1 % O₂ and...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 3bcsv
Computed plasma parameters at the position of the probe-point for 1 % O₂ and...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 4acsv
Electron density for 1 % inlet mass fractions of O₂ for an input microwave...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 4bcsv
Electron temperature for 1 % inlet mass fractions of O₂ for an input...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂- Fig. 4ccsv
Electron density for 10 % inlet mass fractions of O₂ for an input microwave...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 4dcsv
Electron temperature for 10 % inlet mass fractions of O₂ for an input...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 4ecsv
Electron density for 20 % inlet mass fractions of O₂ for an input microwave...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 4fcsv
Electron temperature for 20 % inlet mass fractions of O₂ for an input...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 5acsv
Electron temperature along a line at the position x = -0.02 m for various...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 5bcsv
Gas temperature along a line at the position x = -0.02 m for various inlet...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 6acsv
Number density of electrons along a line at the position x = -0.02 m for...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 6bcsv
Negative oxygen ions along a line at the position x = -0.02 m for various...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 7acsv
Number density of positive charge carriers along a line at the position x...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 7bcsv
Number density of positive charge carriers along a line at the position x...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 7ccsv
Number density of positive charge carriers along a line at the position x...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 7dcsv
Number density of positive charge carriers along a line at the position x...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 7ecsv
Number density of positive charge carriers along a line at the position x...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 7fcsv
Number density of positive charge carriers along a line at the position x...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 8acsv
Number density of O₂ [m^-3] along a line at the position x = -0.02 m for...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 8bcsv
Number density of O [m^-3] along a line at the position x = -0.02 m for...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 8ccsv
Number density of Ar [m^-3] along a line at the position x = -0.02 m for...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 8dcsv
Number density of Ar* [m^-3] along a line at the position x = -0.02 m for...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 9acsv
Electron number density for 50 % of O₂ admixture and 1 kW input microwave...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 9ccsv
Electron number density for 75 % of O₂ admixture and 1,5 kW input microwave...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 9ecsv
Electron number density for 95 % of O₂ admixture and 1,5 kW input microwave...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 9bcsv
Electron temperature for 50 % of O₂ admixture and 1 kW input microwave power...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 9dcsv
Electron temperature for 75 % of O₂ admixture and 1,5 kW input microwave...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 9fcsv
Electron temperature for 95 % of O₂ admixture and 1,5 kW input microwave...

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 10acsv
Gas temperature for 50 % of O₂ at 1 kW input power.

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 10ccsv
Gas temperature for 75 % of O₂ at 1.5 kW input power.

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 10ecsv
Gas temperature for 95 % of O₂ at 1.5 kW input power.

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 10bcsv
Number density of oxygen atoms for 50 % of O₂ at 1 kW input power.

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 10dcsv
Number density of oxygen atoms for 75 % of O₂ at 1.5 kW input power.

Preview Download - The effect of oxygen admixture on properties of microwave generated plasma in Ar-O₂ - Fig. 10fcsv
Number density of oxygen atoms for 95 % of O₂ at 1.5 kW input power.

Preview Download