AURA-WAVE (Sairem)

AURA-WAVE is an Electron Cyclotron Resonance (ECR) coaxial plasma source. It has been designed to be self-adapted once the plasma ignited. A magnetic field combined to the electromagnetic wave allows the creation of plasma at low pressure due to Electron Cyclotron Resonance. AURA-WAVE microwave plasma source has been designed to sustain microwave plasma over several decades of pressure, i.e. from 10⁻⁴ mbar to a few 10⁻² mbar and from a few watts depending on the gas.

Evidence of the Dominant Production Mechanism of Ammonia in a Hydrogen Plasma with Parts Per Million of Nitrogen - Dataset

Absolute ground state atomic hydrogen densities were measured, by utilisation of two-photon absorption laser induced fluorescence (TALIF), in a low pressure electron cyclotron resonance plasma as a function of nitrogen admixtures - 0 to 5000 ppm. At nitrogen admixtures of 1500 ppm and higher the spectral distribution of the fluorescence changes from a single Gaussian to a double Gaussian distribution; this is due to a separate, nascent, contribution arising from the photolysis of an ammonia molecule.

The effect of oxygen admixture on the properties of microwave generated plasma in Ar-O₂ : a modelling study - dataset

This work presents the datasets of the results of a self-consistent modelling analysis on microwave plasma generated in Ar-O₂ mixtures at a frequency of 2.45 GHz at atmospheric pressure. The study focuses on how the plasma properties are in uenced by the increase of the oxygen fraction in the gas mixture. The oxygen admixture is increased from 1 up to 95 % in mass for values of the input microwave power of 1 and 1.5 kW.


By its high degree of flexibility the microwave plasma source MiniMIP allows the efficient use in various sophisticated applications and experiments. The alternative use of pure argon, helium optionally complemented by admixture of molecular gases ensures the ability of matching the process chemistry to the requirements of the specific application.

Device for igniting and generating an expanding diffuse microwave plasma and device for plasma treating surfaces and substances by using this plasma

The present invention relates to an apparatus for igniting and generating a propagating, diffuse microwave plasma. The device is suitable for generating microwave plasmas for the purpose of plasma treatment of surfaces and substances, in particular of three-dimensional objects as well as of particles under atmospheric pressure.
The solutions according to the invention are presented in the claims.