AURA-WAVE is an Electron Cyclotron Resonance (ECR) coaxial plasma source. It has been designed to be self-adapted once the plasma ignited. A magnetic field combined to the electromagnetic wave allows the creation of plasma at low pressure due to Electron Cyclotron Resonance.
AURA-WAVE microwave plasma source has been designed to sustain microwave plasma over several decades of pressure, i.e. from 10-4 mbar to a few 10-2 mbar and from a few watts whatever the gas.