non-thermal

Electrical characteristics of atmospheric-pressure DBD in argon with small admixtures of TMS - measured and calculated data

A time-dependent, spatially one-dimensional fluid-Poisson model has been applied to analyse the impact of small amounts of tetramethylsilane (TMS) on the discharge characteristics of an atmospheric-pressure dielectric barrier discharge (DBD) in argon. Based on an established argon kinetics, it includes a reaction kinetics for TMS, which has been validated by measurements of the ignition voltage at the frequency f = 86.2 kHz for TMS amounts of up to 200 ppm.

On the relationship between SiF4 plasma species and sample properties in ultra low-k etching processes

The temporal behavior of the molecular etching product SiF4 in fluorocarbon-based plasmas used for the dry etching of ultra low-k (ULK) materials has been brought into connection with the polymer deposition on the surface during plasma treatment within the scope of this work. For this purpose, the density of SiF4 has been measured time-resolved using quantum cascade laser absorption spectroscopy (QCLAS).

Electron swarm parameters in C2H6 - measurements and kinetic calculations

The electron swarm parameters (bulk drift velocity, bulk longitudinal component of the diffusion tensor, and effective ionization frequency) in C2H6 (ethane) are investigated for a wide range of the reduced electric field by means of measurements and kinetic calculations. The dataset contains results of measurements in a scanning drift tube apparatus under time-of-flight conditions as well as of kinetic swarm calculations, using solutions of the electron Boltzmann equation and Monte Carlo simulations.

Electron swarm parameters in C2H4 - measurements and kinetic calculations

The electron swarm parameters (bulk drift velocity, bulk longitudinal component of the diffusion tensor, and effective ionization frequency) in C2H4 (ethylene) are investigated for a wide range of the reduced electric field by means of measurements and kinetic calculations. The dataset contains results of measurements in a scanning drift tube apparatus under time-of-flight conditions as well as of kinetic swarm calculations, using solutions of the electron Boltzmann equation and Monte Carlo simulations.

Electron swarm parameters in C2H2 - measurements and kinetic calculations

The electron swarm parameters (bulk drift velocity, bulk longitudinal component of the diffusion tensor, and effective ionization frequency) in C2H2 (acetylene) are investigated for a wide range of the reduced electric field by means of measurements and kinetic calculations. The dataset contains results of measurements in a scanning drift tube apparatus under time-of-flight conditions as well as of kinetic swarm calculations, using solutions of the electron Boltzmann equation and Monte Carlo simulations.

Comparison of six simulation codes for positive streamers in air

The dataset includes all the input and output files for the paper: Comparison of six simulation codes for positive streamers in air (https://doi.org/10.1088/1361-6595/aad768). Three test cases for axisymmetric positive streamers are described in the paper. The codes are of the finite volume or the finite element type, and they use both explicit and implicit time stepping. The computational domain and initial conditions are kept simple, so other codes can be compared relatively easily to the data published here.

Plasma parameters in an Ar-HMDSO DBD at atmospheric pressure for plasma-polymerization experiments

The plasma parameters of a large-area dielectric barrier discharge (DBD) in argon-HMDSO mixtures containing up to about 1600 ppm of the monomer are investigated by means of numerical modelling. A time-dependent,
spatially one-dimensional fluid model is applied, taking into account the spatial variation of the discharge plasma between plane-parallel dielectrics covering the electrodes. The dataset contains values of power dissipated in the DBD as well as the space- and period-averaged density and mean energy of the electrons as a function of HMDSO admixture.

High-speed thermal microscopy of plasma microprinting at atmospheric pressure

The HelixJet (https://www.inptdat.de/helixjet) was applied to simultaneous melting and plasma treatment of polyamide (PA 12) microparticles (diameter 60 µm) used conventionally for 3D printing by laser sintering. This proof-of-principle experiment demonstrated that gaussian thickness profiles of PA 12 can be printed using the HelixJet with a rapid rate of 200 mg/s (peak growth 2 mm/s) and with advantageous material properties. The key element of this novel process is the self-regulated balance between material melting and plasma quenching.

Benchmark data for fluid modelling of low-pressure CCRF discharge plasmas

The dataset contains data from comparative studies of capacitively coupled radio-frequency (CCRF) discharges in helium and argon at pressures between 10 and 80 Pa applying two different fluid modeling approaches as well as two independently developed particle-in-cell Monte Carlo collision (PIC-MCC) codes. The dataset provides a test bed for future studies of simple ccrf discharge configurations in helium and argon at pressures ranging from 10 to 80 Pa.

Correlation of helicality and rotation frequency of filaments in the ntAPPJ

The self-organized behaviour (locked mode) of filaments in the non-thermal atmospheric pressure plasma jet (ntAPPJ) couples a spatial patterning of the discharge (helical symmetry) and a regular motion (steady rotation). The dataset represents the mean rotation frequency of filaments in the capillary with a diameter of 4 mm and the corresponding geometric characteristics: helicality and/or filament inclination angles were measured along with the gas temperature under varying discharge conditions (electric power and argon flow rate).