Non-thermal atmospheric pressure plasma jet (ntAPPJ)




Power: 4-20 W
Frequency: 13 / 27 MHz
Gases: argon, neon, helium, krypton
Pressure: 1 bar

Technology Readiness Level: 


The non-thermal atmospheric pressure plasma jet (ntAPPJ) is composed of a quartz capillary with an inner diameter of 4 mm and an outer diameter of 6 mm. The plasma jet operates at a high frequency of 27.12 MHz in pure noble gases (helium, neon, argon, krypton) at flow rates between 0.1 and 2 slm. Small molecular gas admixtures or organic vapors can be added to the carrier gas. Two outer ring electrodes (width 5 mm, distance 5 mm) are adjusted concentrically with the capillary axis. Filaments in different configurations are generated in the active plasma region between both electrodes. The applied power ranges from 4 to 20 W. An inner capillary can be used to inject a precursor into the effluent.


On a non-thermal atmospheric pressure plasma jet used for the deposition of silicon-organic films
Schäfer, J., Sigeneger, F., Foest, R. et al. Eur. Phys. J. D 72 (2018) 90

On plasma parameters of a self-organized plasma jet at atmospheric pressure
Schäfer, J., Sigeneger, F., Foest, R. et al. Eur. Phys. J. D 60 (2010) 531–538

Miniaturized non-thermal atmospheric pressure plasma jet—characterization of self-organized regimes
Schäfer, J., Foest, R., Ohl, A., Weltmann, K.-D. Plasma Phys. Control. Fusion 51 (2009) 124045



Leibniz Institute for Plasma Science and Technology
Felix-Hausdorff-Str. 2
17489 Greifswald
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The Leibniz Institute for Plasma Science and Technology (INP) is the largest non-university institute in the field of low temperature plasmas, their basics and technical applications in Europe. The institute carries out research and development from idea to prototype. The topics focus on the needs of the market. At present, plasmas for materials and energy as well as for environment and health are the focus of interest.


For further information and/or interest in collaborations please contact:

Dr. Jan Schäfer
Plasma Surface Technology

Tel.: +49 3834 554 3838
Fax: +49 3834 554 301

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