non-thermal

Device for plasma-supported treatment of liquids

Decontamination

The invention relates to a device (10) for treating a liquid with a plasma, the device (10) having a high-voltage electrode (20) and a liquid-permeable ground electrode device (30). The ground electrode device (30) has a flat, conductive area (32) and a porous area (34) arranged on the flat, conductive area (32), the conductive area (32) being liquid-permeable along its area. A discharge space (40) is formed between the ground electrode device (30) and the high-voltage electrode (20).

Device and method for generating a plasma jet

Decontamination

The invention relates to a device (10) for generating a plasma jet (P) comprising a first conduit (11) inside a second conduit (12), a first electrode (17) and a second electrode (18) for generating an electric field in a feed gas flow (F) provided in a first flow channel (15) to generate a plasma jet (P), and adapted to provide a curtain gas flow (C) in the space between the first and second conduit (11,12), wherein the first electrode (17) is positioned radially outside of the first flow channel (15), and wherein the radial distance of the second electrode (18) from a longitudinal axis (l

Device for generating a non-thermal atmospheric pressure plasma

Materials / Surfaces

The invention relates to a device for generating a cold, HF-excited plasma under atmospheric pressure conditions, comprising a metal housing functioning as a grounded electrode in the region of the emergent plasma, wherein an HF generator, an HF resonance coil having a closed ferrite core suitable for the high frequency, an insulating body acting as a gas nozzle, and a high-voltage electrode mounted in the insulating body are disposed in such a manner that they are permeated or circulated around by process gas.

Cold plasma for implement for plasma treatment of surfaces

Materials / Surfaces

A plasma tool for generating a cold plasma beam (10) is described. The plasma tool is defined by the fact that it has a plasma nozzle, in particular a plasma nozzle which is dimensioned for operation by hand, wherein at least the coil (6) of the adaptation network is integrated into the plasma nozzle, for operation with a high frequency generator in addition to the capacitor C2, while the capacitor C1 can be arranged in the generator itself or in its vicinity.

Influence of surface parameters on dielectric-barrier discharges in argon at subatmospheric pressure - dataset

The provided data describe the discharge current in DBD obtained by fluid modelling using different values of for the secondary electron emission coefficient γ and and the relative permittivity of the dielectric barrier εr in comparison with the measured current at a pressure of 100 mbar and an applied voltage amplitude of 1.8 kV. Furthermore, the dissipated power obtained by model calculations for different values of γ and εr together with the measured power in dependence on the pressure is given.

Plasma Chemical Processes
Plasma Medicine

Electrical characteristics of atmospheric-pressure DBD in argon with small admixtures of TMS - measured and calculated data

A time-dependent, spatially one-dimensional fluid-Poisson model has been applied to analyse the impact of small amounts of tetramethylsilane (TMS) on the discharge characteristics of an atmospheric-pressure dielectric barrier discharge (DBD) in argon. Based on an established argon kinetics, it includes a reaction kinetics for TMS, which has been validated by measurements of the ignition voltage at the frequency f = 86.2 kHz for TMS amounts of up to 200 ppm.

Materials / Surfaces
Plasma Chemical Processes

On the relationship between SiF4 plasma species and sample properties in ultra low-k etching processes

The temporal behavior of the molecular etching product SiF4 in fluorocarbon-based plasmas used for the dry etching of ultra low-k (ULK) materials has been brought into connection with the polymer deposition on the surface during plasma treatment within the scope of this work. For this purpose, the density of SiF4 has been measured time-resolved using quantum cascade laser absorption spectroscopy (QCLAS).

Materials / Surfaces
Plasma Chemical Processes

Electron swarm parameters in C2H6 - measurements and kinetic calculations

The electron swarm parameters (bulk drift velocity, bulk longitudinal component of the diffusion tensor, and effective ionization frequency) in C2H6 (ethane) are investigated for a wide range of the reduced electric field by means of measurements and kinetic calculations. The dataset contains results of measurements in a scanning drift tube apparatus under time-of-flight conditions as well as of kinetic swarm calculations, using solutions of the electron Boltzmann equation and Monte Carlo simulations.

Materials / Surfaces
Plasma Chemical Processes

Electron swarm parameters in C2H4 - measurements and kinetic calculations

The electron swarm parameters (bulk drift velocity, bulk longitudinal component of the diffusion tensor, and effective ionization frequency) in C2H4 (ethylene) are investigated for a wide range of the reduced electric field by means of measurements and kinetic calculations. The dataset contains results of measurements in a scanning drift tube apparatus under time-of-flight conditions as well as of kinetic swarm calculations, using solutions of the electron Boltzmann equation and Monte Carlo simulations.

Materials / Surfaces
Plasma Chemical Processes