atmospheric pressure MW discharge

The effect of oxygen admixture on the properties of microwave generated plasma in Ar-O₂ : a modelling study - dataset

This work presents the datasets of the results of a self-consistent modelling analysis on microwave plasma generated in Ar-O₂ mixtures at a frequency of 2.45 GHz at atmospheric pressure. The study focuses on how the plasma properties are in uenced by the increase of the oxygen fraction in the gas mixture. The oxygen admixture is increased from 1 up to 95 % in mass for values of the input microwave power of 1 and 1.5 kW.


Due to its high degree of flexibility, the microwave plasma source MiniMIP is suitable for various different applications and experiments. The plasma can be ignited in both pure argon and pure helium, and furthermore, an admixture of molecular gases to can be used to provide an optimal matching of the process chemistry to the requirements of the specific application.