Becker, Markus M.

Plasma parameters in an Ar-HMDSO DBD at atmospheric pressure for plasma-polymerization experiments

The plasma parameters of a large-area dielectric barrier discharge (DBD) in argon-HMDSO mixtures containing up to about 1600 ppm of the monomer are investigated by means of numerical modelling. A time-dependent,
spatially one-dimensional fluid model is applied, taking into account the spatial variation of the discharge plasma between plane-parallel dielectrics covering the electrodes. The dataset contains values of power dissipated in the DBD as well as the space- and period-averaged density and mean energy of the electrons as a function of HMDSO admixture.

Benchmark data for fluid modelling of low-pressure CCRF discharge plasmas

The dataset contains data from comparative studies of capacitively coupled radio-frequency (CCRF) discharges in helium and argon at pressures between 10 and 80 Pa applying two different fluid modeling approaches as well as two independently developed particle-in-cell Monte Carlo collision (PIC-MCC) codes. The dataset provides a test bed for future studies of simple ccrf discharge configurations in helium and argon at pressures ranging from 10 to 80 Pa.