INP

Leibniz Institute for Plasma Science and Technology
Felix-Hausdorff-Str. 2
17489 Greifswald
GERMANY

www.leibniz-inp.de
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The Leibniz Institute for Plasma Science and Technology (INP) is the largest non-university institute in the field of low temperature plasmas, their basics and technical applications in Europe. In addition to application-oriented research, INP promotes the development of plasma-assisted processes and products.

The institute carries out research and development from idea to prototype. The topics focus on the needs of the market. At present plasmas for materials and energy as well as for environment and health are the focus of interest. Innovative product ideas of the research of INP are transferred by the spin-offs of the institute.

Cite Dataset

Benchmark data for fluid modelling of low-pressure CCRF discharge plasmas

The dataset contains data from comparative studies of capacitively coupled radio-frequency (CCRF) discharges in helium and argon at pressures between 10 and 80 Pa applying two different fluid modeling approaches as well as two independently developed particle-in-cell Monte Carlo collision (PIC-MCC) codes. The dataset provides a test bed for future studies of simple ccrf discharge configurations in helium and argon at pressures ranging from 10 to 80 Pa.

FieldValue
Group
Authors
Release Date
2019-06-14
Resources
Identifier
60dbcdd4-8be4-4f41-896c-e725bdb37fe2
Permanent Identifier (DOI)
Permanent Identifier (URI)
Is supplementing
Plasma Source Name
Plasma Source Specification
Plasma Source Properties
Low-pressure RF plasma between plane electrodes separated by the distance d, driven by a sinusoidal voltage with amplitude V0 and frequency f; d = 2.5 cm (argon) resp. 6.7 cm (helium); V0 = 50-250 V; f = 13.56 MHz; Current density: 10 A/m^2
Plasma Medium Name
Plasma Medium Properties
Gas temperature: 300 K; Pressure: 10-80 Pa
Plasma Diagnostics Name
Plasma Diagnostics Properties

The fluid description of the electron component is performed by means of two different drift-diffusion approaches: the novel drift-diffusion model DDAn introduced in Becker and Loffhagen 2013 (https://doi.org/10.1063/1.4775771) and the commonly used classical drift-diffusion model DDA53 using simplified electron energy transport coefficients. Details of both fluid modelling approaches are given in Becker et al. 2017 (https://doi.org/10.1088/1361-6595/aa5cce). For ions, a time-dependent two-moment model is applied. It takes into account the continuity equation and the momentum balance equation, see Becker et al. 2017 for details. In addition to the fluid modeling approaches, two PIC-MCC simulation codes were developed independently and are applied for mutual verification and benchmarking of the different fluid models for the parameter range considered. Details of the PIC/MCC simulation procedures as well as used cross sections and other input data are given in Becker et al. 2017.

Language
English
License
Public Access Level
Public
Contact Name
Becker, Markus M.
Contact Email

Data and Resources