low pressure

Validation of THz absorption spectroscopy by a comparison with ps-TALIF measurements of atomic oxygen densities

This data set contains the data shown in the corresponding publication in Applied Physics Letters (https://doi.org/10.1063/5.0160303). This publication presents a benchmark of THz absorption spectroscopy against a more established method. Atomic oxygen densities were measured with THz absorption spectroscopy and compared to those obtained from picosecond (ps) two-photon absorption laser induced fluorescence (TALIF) measurements on the same capacitively coupled radio frequency oxygen discharge.

Laser absorption spectroscopy for plasma-assisted thermochemical treatment - dataset

Laser absorption spectroscopy (LAS) was applied to investigate a low pressure DC-pulsed discharge in N2-H2 gas mixtures with addition of CH4 or O2. The discharge was maintained in an industrial-scale, active screen plasma nitrocarburizing (ASPNC) reactor with a steel active screen (AS). Spectroscopic lines of CH4, NH3, HCN, CO and H2O were recorded. The dataset contains the species densities for different gas mixtures.

Introduction and verification of FEDM, an open-source FEniCS-based discharge modelling code - dataset

The dataset contains the data presented in the paper introducing the FEDM (Finite Element Discharge Modelling) code. The FEDM code was developed using the open-source computing platform FEniCS (https://fenicsproject.org). Building on FEniCS, the FEDM code utilises the finite element method to solve partial differential equations. It extends FEniCS with features that allow the automated implementation and numerical solution of fully-coupled fluid-Poisson models, including an arbitrary number of particle balance equations.

Electron swarm transport coefficients in CO - measurements and kinetic studies

The electron swarm transport coefficients (bulk drift velocity, bulk longitudinal component of the diffusion tensor, and effective ionization frequency) in CO are investigated for a wide range of the reduced electric field by means of measurements and kinetic calculations. The set of data contains results of measurements in a scanning drift tube apparatus under time-of-flight conditions as well as of kinetic swarm calculations using solutions of the electron Boltzmann equation and Monte Carlo simulations.

Terahertz absorption spectroscopy for measuring atomic oxygen densities in plasmas - Dataset

This data set contains the data shown in the corresponding publication in Plasma Sources Science and Technology (https://doi.org/10.1088/1361-6595/acb815). This publication presents the first implementation of terahertz (THz) quantum cascade lasers (QCLs) for high-resolution absorption spectroscopy on plasmas. Absolute densities of ground state atomic oxygen were directly obtained by using the fine structure transition at approximately 4.75 THz.

Verified modeling of a low pressure hydrogen plasma generated by electron cyclotron resonance - dataset

A self-consistent fluid model has been successfully developed and employed to model an electron cyclotron resonance driven hydrogen plasma at low pressure. This model has enabled key insights to be made on the mutual interaction of microwave propagation, power density, plasma generation, and species transport at conditions where the critical plasma density is exceeded. The model has been verified by two experimental methods.

AURA-WAVE (Sairem)

AURA-WAVE is an Electron Cyclotron Resonance (ECR) coaxial plasma source. It has been designed to be self-adapted once the plasma ignited. A magnetic field combined to the electromagnetic wave allows the creation of plasma at low pressure due to Electron Cyclotron Resonance. AURA-WAVE microwave plasma source has been designed to sustain microwave plasma over several decades of pressure, i.e. from 10⁻⁴ mbar to a few 10⁻² mbar and from a few watts depending on the gas.

Evidence of the Dominant Production Mechanism of Ammonia in a Hydrogen Plasma with Parts Per Million of Nitrogen - Dataset

Absolute ground state atomic hydrogen densities were measured, by utilisation of two-photon absorption laser induced fluorescence (TALIF), in a low pressure electron cyclotron resonance plasma as a function of nitrogen admixtures - 0 to 5000 ppm. At nitrogen admixtures of 1500 ppm and higher the spectral distribution of the fluorescence changes from a single Gaussian to a double Gaussian distribution; this is due to a separate, nascent, contribution arising from the photolysis of an ammonia molecule.

On the relationship between SiF4 plasma species and sample properties in ultra low-k etching processes

The temporal behavior of the molecular etching product SiF4 in fluorocarbon-based plasmas used for the dry etching of ultra low-k (ULK) materials has been brought into connection with the polymer deposition on the surface during plasma treatment within the scope of this work. For this purpose, the density of SiF4 has been measured time-resolved using quantum cascade laser absorption spectroscopy (QCLAS).

Electron swarm parameters in C2H6 - measurements and kinetic calculations

The electron swarm parameters (bulk drift velocity, bulk longitudinal component of the diffusion tensor, and effective ionization frequency) in C2H6 (ethane) are investigated for a wide range of the reduced electric field by means of measurements and kinetic calculations. The dataset contains results of measurements in a scanning drift tube apparatus under time-of-flight conditions as well as of kinetic swarm calculations, using solutions of the electron Boltzmann equation and Monte Carlo simulations.