Leibniz Institute for Plasma Science and Technology
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17489 Greifswald
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The Leibniz Institute for Plasma Science and Technology (INP) is the largest non-university institute in the field of low temperature plasmas, their basics and technical applications in Europe. The institute carries out research and development from idea to prototype. The topics focus on the needs of the market. At present, plasmas for materials and energy as well as for environment and health are the focus of interest.

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Plasma parameters in an Ar-HMDSO DBD at atmospheric pressure for plasma-polymerization experiments

The plasma parameters of a large-area dielectric barrier discharge (DBD) in argon-HMDSO mixtures containing up to about 1600 ppm of the monomer are investigated by means of numerical modelling. A time-dependent,
spatially one-dimensional fluid model is applied, taking into account the spatial variation of the discharge plasma between plane-parallel dielectrics covering the electrodes. The dataset contains values of power dissipated in the DBD as well as the space- and period-averaged density and mean energy of the electrons as a function of HMDSO admixture.

Release Date
Permanent Identifier (DOI)
Permanent Identifier (URI)
Is supplementing
Plasma Source Name
Plasma Source Application
Plasma Source Specification
Plasma Source Properties

Atmospheric pressure DBD between plane electrodes covered by dielectrics (glass and Macor); Powered electrode: Macor covered, thickness of dielectric: 3.5 mm; Grounded electrode: glass covered, thickness of dielectric: 3.0 mm; Discharge gap: 2 mm; Discharge area: 216 cm^2; Voltage supply: sinusoidal voltage with amplitude of 3.9 kV and frequency of 20 kHz; RMS current: about 50 mA

Plasma Medium Name
Plasma Medium Properties
Gas temperature: 300 K; Pressure: 1 atm; Gas mixture: Ar + 20 to 1600 ppm HMDSO
Plasma Diagnostics Name
Plasma Diagnostics Properties

The time-dependent, spatially one-dimensional fluid-Poisson model includes particle balance equations for the densities of electrons, relevant neutral particles and ions, the electron energy balance equation to determine the mean electron energy, the Poisson equation to calculate the electric potential and field, as well as a balance equation for the surface charge density to consider the accumulation of charge carriers on the dielectric surfaces. Details about the basic equations, the reaction kinetics model, the transport properties and rate coefficients, the boundary conditions and the solution method are reported in Loffhagen et al. (

Public Access Level
Contact Name
Loffhagen, Detlef
Contact Email

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