Modelling results obtained with MCPlas using the 4-species RKM (reaction kinetic model). Data contain period-averaged particle species number densities, mean electron energy and electric field. Modelling was carried out using a sinusoidal voltage with an amplitude of 350 V and a frequency of 13.56 MHz. A gap distance of 1 cm, a gas pressure of 1 Torr and a gas temperature of 300 K were also considered in the modelling.