INP

Leibniz Institute for Plasma Science and Technology
Felix-Hausdorff-Str. 2
17489 Greifswald
GERMANY

https://www.inp-greifswald.de/en/
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The Leibniz Institute for Plasma Science and Technology (INP) is the largest non-university institute in the field of low temperature plasmas, their basics and technical applications in Europe. The institute carries out research and development from idea to prototype. The topics focus on the needs of the market. At present, plasmas for materials and energy as well as for environment and health are the focus of interest.

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Creative Commons Attribution 4.0 International (CC BY 4.0)
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MCPlas, a MATLAB toolbox for reproducible plasma modelling with COMSOL - dataset

Plasma Chemical Processes

The dataset contains all input data and results of the MCPlas toolbox presented in the publication [https://doi.org/10.1016/j.cpc.2026.110248]. The MCPlas toolbox represents a collection of MATLAB functions for the automated generation of an equation-based fluid-Poisson model for non-thermal plasmas in the multiphysics simulation software COMSOL. Following the development of the new generation of the LXCat platform, all input data are prepared in a structured and interoperable JSON format and can be supplied and validated using existing JSON schemas. The toolbox includes fully transparent, editable MATLAB source code and offers an advanced description of electron transport in addition to commonly used approaches in the plasma modelling community. It supports one-dimensional and two-dimensional modelling geometries employing Cartesian, polar and cylindrical coordinate systems. MCPlas is tested on two reference cases: DC- and RF-driven low-pressure glow discharges in argon.

basic research
fluid modelling
Comsol
reproducibility
benchmark data
FieldValue
Group
INP
TU/e Department of Applied Physics and Science Education
Plasma Matters BV
Authors
Stankov, Marjan
Boer, Daan
Graef, Wouter
van 't Veer, Kevin
Jovanović, Aleksandar
Sigeneger, Florian
Loffhagen, Detlef
van Dijk, Jan
Becker, Markus M.
Release Date
2026-02-23
Identifier
4955b752-4fc5-4eb8-90b4-8e8a9f296451
Permanent Identifier (DOI)
10.34711/inptdat.1033
Permanent Identifier (URI)
https://www.inptdat.de/node/1033
Is supplementing
10.1016/j.cpc.2026.110248
Plasma Source Name
glow discharge
CCP
Plasma Source Application
non-thermal plasma generation
Plasma Source Specification
AC
DC
high frequency
low pressure
non-thermal
Plasma Source Properties

All modelling studies were performed for two test cases, namely DC and RF low-pressure glow discharges in argon using a plane-parallel electrode configuration. DC case: A contant DC voltage of 350 V is applied at the powered electrode. RF case: a sinusoidal voltage with an amplitude of 350 V and a frequency of 13.56 MHz is used. The gap distance is set to 1 cm.
Plasma Source Procedure

The DC and RF discharges are simulated until reaching a quasi-stationary state.
Plasma Medium Name
Ar
Plasma Medium Properties

Pressure: 1 Torr
Temperature: 300 K
Plasma Medium Procedure

Gas temperature and pressure are kept constant throughout the simulations.
Plasma Diagnostics Name
fluid-Poisson model
MCPlas
Plasma Diagnostics Properties

The plasma description provided by MCPlas is based on a fluid-Poisson model comprising balance equations for the particle number densities of species, a balance equation for the energy density of electrons and the Poisson equation for the self-consistent determination of the electric potential and electric field. The particle fluxes and the electron energy flux are described in different drift-diffusion approximations, where DDAn and DDA5/3 are used for electrons.
Plasma Diagnostics Procedure

The model generated by MCPlas is compared with the COMSOL Plasma Module (CPM). To demonstrate the ability of MCPlas to manage different reaction kinetic models (RKMs), a 4-species and a 23-species RKM are used to model the DC and RF argon plasmas. Furthermore, the reusability of the JSON schema-based input data defining the RKM is demonstrated by a comparison study involving the plasma modelling software PLASIMO and FEDM.
Language
English
License
Creative Commons Attribution 4.0 International (CC BY 4.0)
Public Access Level
Public
Contact Name
Stankov, Marjan
Contact Email
marjan.stankov@inp-greifswald.de

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