Modelling results obtained with MCPlas using the 4-species RKM (reaction kinetic model), option DDAn (improved drift-diffusion approximation) and boundary conditions (10), (11) and (14) from the manuscript. The data contain period-averaged number densities of electrons and atomic argon ions, mean electron energy and number densities of metastable argon states in the stationary state of the RF glow discharge. Modelling was carried out using a sinusoidal voltage with an amplitude of 350 V and a frequency of 13.56 MHz. A gap distance of 1 cm, a gas pressure of 1 Torr, and a gas temperature of 300 K were also considered in the modelling.