Primary tabs

MCPlas, a MATLAB toolbox for reproducible plasma modelling - Figure 16: PLASIMO modelling results using 4-species RKM for RF case

Modelling results obtained with PLASIMO using the 4-species RKM (reaction kinetic model). The data contains period-averaged density and mean energy of electrons as well as the density of heavy-particle species in stationary state of the RF glow discharges in argon. Modelling was carried out using a sinusoidal voltage with an amplitude of 350 V and a frequency of 13.56 MHz . A gap distance of 1 cm, a gas pressure of 1 Torr and a gas temperature of 300 K were also considered for the modelling.

Data Preview: Note that by default the preview only displays up to 100 records. Use the pager to flip through more records or adjust the start and end fields to display the number of records you wish to see.

Resources

Additional Information

FieldValue
mimetypetext/csv
filesize418.67 KB
resource typefile upload
timestampJun 08, 2026
Resource filetype csv
Resource datatype data table
Resource range gap distance x: 0-1 cm
Resource quality published