Topic

Application

Plasma Source

Tags

Author

Datasets

80 results

AURA-WAVE (Sairem)

INP

    AURA-WAVE is an Electron Cyclotron Resonance (ECR) coaxial plasma source. It has been designed to be self-adapted once the plasma ignited. A magnetic field combined to the electromagnetic wave allows the creation of plasma at low pressure due to...

    Device and method for generating a plasma jet

    INP

      The invention relates to a device (10) for generating a plasma jet (P) comprising a first conduit (11) inside a second conduit (12), a first electrode (17) and a second electrode (18) for generating an electric field in a feed gas flow (F)...