high frequency

Non-thermal atmospheric pressure plasma jet (ntAPPJ)

Materials / Surfaces

The non-thermal atmospheric pressure plasma jet (ntAPPJ) is composed of a quartz capillary with an inner diameter of 4 mm and an outer diameter of 6 mm. The plasma jet operates at a high frequency of 27.12 MHz in pure noble gases (helium, neon, argon, krypton) at flow rates between 0.1 and 2 slm. Small molecular gas admixtures or organic vapors can be added to the carrier gas. Two outer ring electrodes (width 5 mm, distance 5 mm) are adjusted concentrically with the capillary axis.

HelixJet

Materials / Surfaces

The HelixJet is a capacitively coupled radio-frequency (RF) plasma source operating at atmospheric pressure. The RF power is applied to two double helix electrodes. The electrodes are placed outside a quartz tube fed by the working gas. The HelixJet has unique features highly relevant for practical applications. The innovative double helix electrode design enables extremely stable and homogeneous plasma conditions at low gas flow rates. This plays a crucial role for the quality and reproducibility of several applications, e.g.

Device, system, and method for antimicrobial treatment, method for producing the device, and computer program

Plasma Medicine

The invention relates to a device, to a system, and to a method for antimicrobial treatment during performance of operations in bodies, to a method for producing the device, and to a computer program. A device (11) is provided for antimicrobial treatment during performance of operations, in particular minimally invasive operations, in bodies. Said device comprises a main body (1) for partial introduction into a body and at least one plasma source (12) arranged in at least one portion of the main body (1).

Plasma treatment device

Plasma Medicine

A plasma treatment device having an electrode arrangement (3) for generating a plasma in a supplied gas stream. The electrode arrangement has at least one movably mounted electrode. The plasma is preferably a cold atmospheric pressure plasma and can be generated so as to vary in location by means of movement of the at least one electrode.

Ar metastable densities (³P₂) in the effluent of a filamentary atmospheric pressure plasma jet with humidified feed gas - dataset

The Ar(³P₂) metastable density in the effluent of the cold atmospheric pressure plasma jet kINPen-sci was investigated as a function of the feed gas humidity, the gas curtain composition, and the distance from the nozzle by means of laser atomic absorption spectroscopy. The data set comprises the axial distributions of the Ar metastables as a function of these parameters.

Plasma Chemical Processes

Multi Frequency Plasma Generating Device and Associated Method

Plasma Medicine

The invention relates to a device (1) for generating a plasma, particularly an atmospheric plasma, comprising: a plasma source (100) having a first electrode (101) and optionally a second electrode (102) being arranged opposite the first electrode (101), and a volume (or channel) (103) arranged adjacent the first electrode (101) for receiving a gas (G), and at least one radiofrequency power supply (200) in electrical contact with said first electrode (101) for applying a radiofrequency voltage (V) thereto.

On the relationship between SiF4 plasma species and sample properties in ultra low-k etching processes

The temporal behavior of the molecular etching product SiF4 in fluorocarbon-based plasmas used for the dry etching of ultra low-k (ULK) materials has been brought into connection with the polymer deposition on the surface during plasma treatment within the scope of this work. For this purpose, the density of SiF4 has been measured time-resolved using quantum cascade laser absorption spectroscopy (QCLAS).

Materials / Surfaces
Plasma Chemical Processes

High-speed thermal microscopy of plasma microprinting at atmospheric pressure

The HelixJet (https://www.inptdat.de/helixjet) was applied to simultaneous melting and plasma treatment of polyamide (PA 12) microparticles (diameter 60 µm) used conventionally for 3D printing by laser sintering. This proof-of-principle experiment demonstrated that gaussian thickness profiles of PA 12 can be printed using the HelixJet with a rapid rate of 200 mg/s (peak growth 2 mm/s) and with advantageous material properties. The key element of this novel process is the self-regulated balance between material melting and plasma quenching.

Materials / Surfaces